A CMOS temperature sensor with a 49fJK2 resolution FoM

Abstract

This paper presents the most energy-efficient CMOS temperature sensor ever reported, with a resolution FoM of 49fJ K2, 2.7× better than the state-of-the-art. It consists of a Wheatstone bridge made from poly-silicon resistors, which is readout by a 2nd-order Continuous-Time Delta-Sigma modulator (CTDSM). This approach leads to a high resolution (160μΚ in 10ms) and a low supply-voltage sensitivity (< 20mK/V at room temperature).