{"title":"SAW Accelerometers: Integration of Thick and Thin Film Technologies","authors":"T. B. Bonbrake, C. Erikson, D. Thoma","doi":"10.1109/ULTSYM.1985.198578","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":240321,"journal":{"name":"IEEE 1985 Ultrasonics Symposium","volume":"59 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE 1985 Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1985.198578","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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