Towards a Microsytem of Multiple Production of Micro-Drops Manufactured on Silicon

Abstract

In this paper, the development of a microsystem of multiple production of micro-drops manufactured on silicon is reported. The technology used to generate the micro-drops is flow focusing. Therefore, the aim is the integration of flow focusing technology on silicon for mass production of microparticles, in this case, micro-drops. All the alternative fabrication processes on silicon, with their advantages and disadvantages not only about fabrication, but also flow focusing operation, are explained. The behaviors of the device obtained by simulations are displayed. The results of simulations show stable and unstable behaviors. The instabilities are due to fluidic interactions. From these simulation some solutions are proposed in order to solve the instability, and therefore, to improve the range of operation of the device.