Integration of photonic functions in and with silicon

Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) Pub Date : 2004-11-15 DOI:10.1109/ESSDER.2004.1356486

R. Baets, W. Bogaerts, P. Dumon, G. Roelkens, I. Christiaens, K. De Mesel, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, D. van Thourhout, V. Wiaux, J. Wouters, S. Beckx

引用次数: 5

Abstract

Silicon is gaining importance in photonic systems on a chip, either because of the importance of integrating photonic functions with electronic functions or because of the potential of silicon-based technology for photonics as such. In this paper, we discuss two distinct developments. The first is the development of nano-photonic integrated circuits based on photonic crystals or photonic wires. The second is the development of heterogeneously integrated active photonic components on top of silicon by means of wafer bonding.

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光子函数在硅中的积分和与硅的积分

硅在芯片上的光子系统中越来越重要，要么是因为光子功能与电子功能集成的重要性，要么是因为硅基光子学技术的潜力。在本文中，我们讨论两个不同的发展。首先是基于光子晶体或光子线的纳米光子集成电路的发展。二是利用晶圆键合的方法在硅上开发异质集成有源光子元件。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850)

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