Effect of transmission line pulsing of interconnects investigated using combined low-frequency noise and resistance measurements

Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) Pub Date : 2001-07-09 DOI:10.1109/IPFA.2001.941463

L. W. Chu, W. Chim, K. Pey, A. See

引用次数: 2

Abstract

A novel technique of combining 1/f noise and resistance measurements for characterising electrostatic discharge (ESD) induced voiding damage in aluminium interconnects is reported. The ESD stress was performed using the transmission line pulsing (TLP) technique. Samples of different line widths, with and without an overlying passivation, were studied.

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采用低频噪声和电阻测量相结合的方法研究了传输线脉冲对互连的影响

报道了一种将1/f噪声和电阻测量相结合的新技术，用于表征静电放电(ESD)引起的铝互连中的空洞损伤。采用传输线脉冲(TLP)技术进行ESD应力测量。不同线宽的样品，有和没有覆盖钝化，进行了研究。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)

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