Two-photon microfabrication with a supercritical CO2 drying process toward replication of three-dimensional microstructures

Abstract

We have fabricated three-dimensional (3D) microstructures using two-photon microfabrication with supercritical rinsing. Since the surface tension while rinsing the microstructures can be removed, sophisticated 3D microstructures such as a cantilever and a lattice were fabricated without deformation during drying process. We also fabricated microstructures including thin partition membrane as a master model for replication of 3D microstructures with closed loops such as a beam and table. Such 3D microtransfer molding will be applied to fabrication of microdevices for biochip technology and nanophotonics.