GaN microring waveguide bonded to Si substrate by polymer

R. Hashida, T. Sasaki, K. Hane
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引用次数: 2

Abstract

Hybrid integration of GaN and Si photonic devices is promising. Using a polymer bonding technique, GaN microring resonators are fabricated on Si substrate. Transmission characteristics of the GaN microring is measured.
GaN微环波导与硅衬底的聚合物键合
氮化镓和硅光子器件的混合集成是很有前途的。采用聚合物键合技术,在硅衬底上制备了GaN微环谐振器。测量了GaN微环的传输特性。
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