Design of a large area magnetic field sensor array

Y. Audet, G. Chapman
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引用次数: 7

Abstract

The circuit design of a Large Area Magnetic Field Sensor Array (LAMFSA) using CMOS 3 /spl mu/m process is described. This prototype is developed mainly for application in magnetic field mapping and tactile array sensors. In order to enable the production of such a device, redundancy schemes are implemented and a laser interconnection post fabrication technique is used. The basic sensing cell consists of a double drain/double source MOS magnetic field sensor (MAGFET). The design architecture is strongly influenced by the sensor function and the defect avoidance criteria. Aided by SPICE, test and reconfiguration issues involved in the post fabrication processing are described.<>
大面积磁场传感器阵列的设计
介绍了一种采用CMOS 3 /spl mu/m工艺的大面积磁场传感器阵列(LAMFSA)的电路设计。该样机主要用于磁场测绘和触觉阵列传感器。为了使生产这样的设备,冗余方案实施和激光互连后制造技术的使用。基本传感单元由双漏/双源MOS磁场传感器(MAGFET)组成。传感器功能和缺陷避免准则对设计体系结构有很大影响。在SPICE的帮助下,描述了制造后加工中涉及的测试和重新配置问题。
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