{"title":"Design of a large area magnetic field sensor array","authors":"Y. Audet, G. Chapman","doi":"10.1109/ICWSI.1994.291245","DOIUrl":null,"url":null,"abstract":"The circuit design of a Large Area Magnetic Field Sensor Array (LAMFSA) using CMOS 3 /spl mu/m process is described. This prototype is developed mainly for application in magnetic field mapping and tactile array sensors. In order to enable the production of such a device, redundancy schemes are implemented and a laser interconnection post fabrication technique is used. The basic sensing cell consists of a double drain/double source MOS magnetic field sensor (MAGFET). The design architecture is strongly influenced by the sensor function and the defect avoidance criteria. Aided by SPICE, test and reconfiguration issues involved in the post fabrication processing are described.<<ETX>>","PeriodicalId":183733,"journal":{"name":"Proceedings of 1994 International Conference on Wafer Scale Integration (ICWSI)","volume":"88 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-01-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 International Conference on Wafer Scale Integration (ICWSI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICWSI.1994.291245","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
The circuit design of a Large Area Magnetic Field Sensor Array (LAMFSA) using CMOS 3 /spl mu/m process is described. This prototype is developed mainly for application in magnetic field mapping and tactile array sensors. In order to enable the production of such a device, redundancy schemes are implemented and a laser interconnection post fabrication technique is used. The basic sensing cell consists of a double drain/double source MOS magnetic field sensor (MAGFET). The design architecture is strongly influenced by the sensor function and the defect avoidance criteria. Aided by SPICE, test and reconfiguration issues involved in the post fabrication processing are described.<>