Design and Simulation of High Flowrate Piezoelectric Pump based on Rhombic Piezoelectric Actuator

Abstract

This paper utilizes displacement amplifying mechanism and resonance drive to improve the output performance of piezoelectric pump. A rhombic piezoelectric actuator is designed and simulated with a piezoelectric stack (10 mm×10 mm×18.2 mm) and a rhombic displacement amplifying mechanism. Modal analyses of the rhombic piezoelectric actuator are carried out under fixed-vibrating constraint and symmetric constraint. The simulation results show that the resonant frequencies of the actuator in bending vibrating mode under fixed-vibrating and symmetric constraints are 724.6 Hz and 3205.9 Hz respectively. Then piezoelectric pumps are designed with two types of rhombic piezoelectric actuators vibrating two diaphragm pumps simultaneously in a symmetric structure. High flowrates output of the presented piezoelectric pumps design can be expected.