{"title":"Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation","authors":"W. Ensinger","doi":"10.1016/J.ENDEND.2009.03.101","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":424132,"journal":{"name":"Journal of End-to-end-testing","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"30","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of End-to-end-testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/J.ENDEND.2009.03.101","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}