T. Zengerle, J. Joppich, H. Lensch, A. Ababneh, H. Seidel
{"title":"A Lumped Element Model for the Damping Mechanism of Micro-oscillators in the Transitional Flow Regime","authors":"T. Zengerle, J. Joppich, H. Lensch, A. Ababneh, H. Seidel","doi":"10.1109/ICM50269.2020.9331778","DOIUrl":null,"url":null,"abstract":"This study presents a Lumped Element Model (LEM) for the different damping mechanisms of micro-oscillators oscillating in a gas medium near a boundary. The LEM is based on resistive and inductive components as well as on a newly introduced inductive constant phase element (CPE). The model is applied to experimental data of micro-oscillators for six different gas atmospheres and gap widths to a limiting boundary in-between 150 to 3500 μm. The LEM is in good agreement with the experimental data of the first four bending modes and the electronic components exhibit a reasonable correlation to the physical properties of the measured gases.","PeriodicalId":243968,"journal":{"name":"2020 32nd International Conference on Microelectronics (ICM)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 32nd International Conference on Microelectronics (ICM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICM50269.2020.9331778","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This study presents a Lumped Element Model (LEM) for the different damping mechanisms of micro-oscillators oscillating in a gas medium near a boundary. The LEM is based on resistive and inductive components as well as on a newly introduced inductive constant phase element (CPE). The model is applied to experimental data of micro-oscillators for six different gas atmospheres and gap widths to a limiting boundary in-between 150 to 3500 μm. The LEM is in good agreement with the experimental data of the first four bending modes and the electronic components exhibit a reasonable correlation to the physical properties of the measured gases.