Bending Fatigue of Laser-sintered Copper Films on Plasma Bombarded PI Substrate

Wei Cheng, Cing-Wun Jheng, Ming-Tsang Lee, Jenn-Ming Song
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Abstract

In this study, cuprous oxide composite pastes were screen-printed on the plasma-modified polyimide substrates to form highly conductive copper films by means of laser sintering. The average resistivity of reduced and sintered copper films can be down to 4 μΩ-cm (theoretical resistivity of copper is 1.8 μΩ-cm). Cyclic bending test of the copper films on PI substrates (Rnom: 2.91 mm, and bending frequency: 1 Hz) were carried out to evaluate the fatigue reliability, and the variation of the electrical resistivity with the bending cycle number was also recorded. Experimental results show that O2 plasma caused a greater surface energy (especially polar component), higher surface roughness, and thereby exhibit superior bending fatigue resistance.
等离子体轰击PI基板上激光烧结铜膜的弯曲疲劳
本研究采用激光烧结的方法,在等离子体改性聚酰亚胺基板上丝网印刷氧化亚铜复合浆料,形成高导电性的铜膜。还原和烧结铜膜的平均电阻率可降至4 μΩ-cm(铜的理论电阻率为1.8 μΩ-cm)。在Rnom为2.91 mm,弯曲频率为1 Hz的情况下,对PI基板上的铜膜进行了循环弯曲试验,以评估其疲劳可靠性,并记录了其电阻率随弯曲循环次数的变化情况。实验结果表明,O2等离子体产生了更大的表面能(特别是极性成分),更高的表面粗糙度,从而表现出优异的抗弯曲疲劳性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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