Layout-dependent STI stress analysis and stress-aware RF/analog circuit design optimization

Abstract

With the continuous shrinking of feature size, various effects due to shallow-trench-isolation (STI) stress are becoming more and more significant. The resulting nonuniform distribution of stress affects the MOSFET characteristics and hence changes the circuit behavior. This paper proposes a complete flow to characterize the influence of STI stress on performance of RF/analog circuits based on layout design and process information. An accurate and efficient FEM-based stress simulator has been developed to handle the layout dependence. A comprehensive MOSFET model is also proposed to capture the effects of STI stress on mobility, threshold voltage, and leakage current. The influence of layout-dependent STI stress on the circuit performance is further studied, and the corresponding optimization strategies to circuit design are discussed. A realistic PLL design realized using 90nm CMOS technology is used as a test case for the proposed approach.