Auto Threshold Management after Equipment Maintenance

Abstract

In management of the FDC (Fault Detection and Classification) alarm threshold, sensor drift after maintenance has been big and major challenge. Especially in etching area where has relatively short maintenance (cleaning) cycle and many chambers and recipes (our fab is high-mix low-volume type.). We developed auto threshold re-calculate system practical and easily introduce. Using the system we successfully reduce needed cost of re-calculate the threshold and loss of manufacturing time.