Approach for environmental standard with etch tools

Abstract

In order to reduce electrical power usage and the consumption of PFCs, we have researched three kinds of techniques. The first is intermittent operation of dry pumps. The next is chiller with a new refrigeration system. The technique is a gas circulation system. The first technique, intermittent pump operation, results in 51.6% reduction in carbon dioxide to be emitted for the use of energy, which includes electrical energy, nitrogen and cooling water. Next, the new Chiller conserves 68% of the electrical energy at maximum. The gas circulation system can mark 50-70% reduction in the usage of process gases, and this leads to approximately 75% reduction in PFCs emissions.