Dynamic behavior modeling of MEMS parallel plate capacitors

Abstract

This work presented dynamic behaviors of a MEMS parallel plate capacitor using analytical and numerical methods. The differential equation describing the electrode displacement is solved by using a Matlab/Simulink interface developed to serve as a practical fill-the-box design tool. The system's dynamic instability condition (at the pull-in voltage, V/sub dpi/) is reached at much higher bias levels as compared with the static case. We presented the dynamic behavior and the frequency limiting cases for sine and pulse input bias waveforms. For high frequency, the results are given both in analytical and numerical forms.