An improvable ferroelectric tactile sensor with acoustic running wave

Abstract

This work treats the known construction of tactile array sensors based on ferropiezoceramic materials. Some theoretical features of the physical phenomena of the excitation and moving of a running bulk acoustic wave (RBAW) as information carrier in the active array substrate are discussed. The authors' idea is to develop a tactile sensor array together with the primary data processing device as a hybrid micro system. For this purpose the authors assess the opportunities for transition from the array systems, with sizes of sensitive elements in the millimeter range, to the integrated tactile information systems with sensitive element sizes in the micron range. The physical processes in the active ferropiezoceramic substrate of a tactile microsensor have been studied by computer simulation with the two- and one-dimensional mathematical models. This allows improved construction of the tactile array sensor for further integration into the tactile microsystem.