S. H. Tsang, Olivier Cometto, M. K. Samani, Shuangxi Sun, Johan Liu, Edwin Hang Tong Teo
{"title":"Anisotropic thermal conductivity of vertically self-ordered Nanocrystalline Boron Nitride thin films for thermal hotspot mitigation in electronics","authors":"S. H. Tsang, Olivier Cometto, M. K. Samani, Shuangxi Sun, Johan Liu, Edwin Hang Tong Teo","doi":"10.1109/EDTM.2018.8421414","DOIUrl":null,"url":null,"abstract":"Thermal-crosstalk has become a prominent issue in modern electronic. Here, we present a new type of vertically-ordered Boron Nitride (voBN) thin films to address such limitation. voBN has a high anisotropic thermal conductivity with 16 times difference between through-plane and in-plane and can be deposited in room temperature. We studied the thermal properties with 3\\omega method and verified with COMSOL Multiphysics simulations. Such characteristic would allow hotspot density to increase by 295%.","PeriodicalId":418495,"journal":{"name":"2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM)","volume":"375 ","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDTM.2018.8421414","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Thermal-crosstalk has become a prominent issue in modern electronic. Here, we present a new type of vertically-ordered Boron Nitride (voBN) thin films to address such limitation. voBN has a high anisotropic thermal conductivity with 16 times difference between through-plane and in-plane and can be deposited in room temperature. We studied the thermal properties with 3\omega method and verified with COMSOL Multiphysics simulations. Such characteristic would allow hotspot density to increase by 295%.