Nanometer-scale material analysis using Fourier transform mapping

Abstract

This paper presents a new technique for imaging material distribution based on a transmission electron micrograph. This technique, Fourier transform mapping, provides structural information of crystal with nanometer-scale resolution. This technique provides complimentary information to TEM-EDX technique, which provides microscopic information of chemical element. This technique is demonstrated by material analysis of LSI contacts. This demonstration shows the potential for Fourier transform mapping to be used as a microanalysis tool for LSI devices.