Thin film diamond-like carbon dielectrics

Abstract

A prototype manufacturing technology for high energy density and high volumetric efficiency diamond-like carbon (DLC) capacitors has been demonstrated. A unique dual ion-beam deposition and web-handling system has been designed, developed and constructed. The high quality DLC films were directly deposited on the both sides of the capacitor grade aluminum foil in a continuous feed mode. The highly efficient hydrocarbon ions were produced by two 6 cm /spl times/ 22 cm linear RF (13.56 MHz) inductively coupled ion sources. The dual ion gun system is housed in a class 100 clean room environment. The high performance DLC capacitors were then produced by rolling a pair of DLC-coated aluminum foils in a winding system.