Bottom emitting 1.3 /spl mu/m BH-FP laser with integrated 45/spl deg/ reflector and monitor photodiode

K. Janiak, P. Albrecht, S. Fidorra, H. Heidrich, W. Rehbein, H. Roehle, H. Althaus
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引用次数: 2

Abstract

We realized for the first time by a complete monolithic integration a bottom emitting laser OEIC including laser, monitor photodiode, and prism for SMT-packaging. This approach with the fabrication of the laser and reflection mirrors in full wafer technology exploits additionally the cost efficient advantages of on wafer facet preparation and on-wafer characterization.
底部发射1.3 /spl mu/m BH-FP激光器,集成45/spl度反射器和监控光电二极管
我们首次通过完整的单片集成实现了用于smt封装的底部发射激光器OEIC,包括激光器,监控光电二极管和棱镜。这种在全晶圆技术中制造激光和反射镜的方法还利用了晶圆面制备和晶圆上表征的成本效益优势。
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