Modeling on increase of n-p-n and p-n-p current gain by hydrogen electromigration in polysilicon emitters

J. Zhao, G. Li, K. Liao, M. Chin, J. Sun, P. Ratnam
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引用次数: 3

Abstract

A unified analytical model that relates the increase of current gain to forward current stress is presented for both poly emitter n-p-n and p-n-p transistors. This model is based on electromigration of atomic hydrogen and its subsequent passivation of dangling bonds at polysilicon grain boundaries and poly/mono-silicon interface. The comparison between experiment and simulation results is also presented.<>
多晶硅发射体中氢电迁移增加n-p-n和p-n-p电流增益的建模
提出了n-p-n和p-n-p两种多发射极晶体管电流增益增加与正向电流应力的统一解析模型。该模型基于原子氢的电迁移及其随后在多晶硅晶界和多晶硅/单晶硅界面上悬垂键的钝化。并对实验结果与仿真结果进行了比较。
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