High Yield Transferred Substrate InP DHBT

T. Kraemer, F. Lenk, A. Maaßdorf, H. Wuerfl, G. Traenkle
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引用次数: 6

Abstract

A transferred substrate InP DHBT of 0.8 mum emitter width was developed. The transistors featured high yield and homogeneous device characteristics over the three inch wafer, with an average of ft = 300 GHz plusmn 3%SD, fmax = 250 GHz plusmn 5%SD at a breakdown voltage of BVceo = 6 V.
高收率转移基板在p - DHBT
研制了一种发射极宽度为0.8 μ m的转移衬底InP DHBT。这些晶体管在3英寸晶圆上具有高良率和均匀的器件特性,在击穿电压BVceo = 6 V时,平均ft = 300 GHz + usmn 3%SD, fmax = 250 GHz + usmn 5%SD。
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