Miniature microwave RF MEMS tunable waveguide filter

Abstract

This paper presents an RF MEMS tunable filter implemented in waveguide. A compact waveguide topology was chosen to make use of high-Q cavity resonators for the creation of a low-loss, two-pole filter. The filter results in an insertion loss of 4.7–5.8 dB over the tuning range 10.12–10.33 GHz with a relative bandwidth of 0.42–0.67%. This design demonstrates an unloaded quality factor of 169–319 over the tunable frequency range with the potential to exceed 500.