Optical MEMS accelerometer sensor relying on a micro-ring resonator and an elliptical disk

Abstract

Here, a novel optical micro-electro-mechanical systems (MEMS) accelerometer sensor based on a micro-ring resonator and an elliptical disk is proposed. The designed optical MEMS accelerometer is then analysed to obtain its functional characteristics. The proposed optical MEMS sensor presents an optical sensitivity of 0.0025 nm/g, a mechanical sensitivity of 1.56 nm/g, a linear measurement range of ±22 g, a first resonance frequency of 13.02 kHz, and a footprint of 34 μm × 50 μm. Furthermore, the achieved functional characteristics of the proposed accelerometer are compared to several recent contributions in the related field. According to this comparison study, the present optical MEMS accelerometer can be a suitable device for many applications ranging from consumer electronics to inertial measurement units.