Finding a new type of in-line failure mechanism “Floating Antenna Effect” and its solution

Abstract

On a new embedded flash platform we have got high failure rate on charge pump test. It is impossible to directly force external current into failure signal path to do FA but we did it under dynamic condition. Afterwards we have captured metal short locations by emission scope which is rarely seen. Then we used in-line KLA SEM VC scan to define the real failure mechanism - a new type of antenna effect, and finally solved it with combined process condition changes. We named the new type of antenna effect “Floating Antenna Effect”.