Research of the field emission of fractal blades patterns of large length

IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839) Pub Date : 2004-09-06 DOI:10.1109/IVESC.2004.1414140

Y. Gulyaev, V.N. Koro, Y. Grigorev, G. A. Rehen

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Abstract

The looking up of effective, cost-effective (cold) sources of intensive beam couplings is one of actual problems of modern vacuum micro- and nanoelectronics. As far as it is known, the difficulties of deriving of large absolute values of a current of field emission are connected to extremely small values of the effective area of emission component, which forms 10/sup -6/ to 10/sup -8/ part from the area of a cathodic substrate. One of methods of increasing of the effective area of emission is the transferring from regular bivariate tips of gratings to surface patterns blade or planar-end configuration with extended fractal boundaries. Apparently, that substantial surface micro- and nanostructure from this or that fraction can be referred to natural fractals. As it was shown, field emission properties of close set film and monolithic carbon patterns on conductive substrates can be essentially improved by a simple vacuum discharge converting 2D pattern with mean values of a period 65-70 nm, altitude 7-8 nm, and radius of curvature of tops 2-3 nm, in discontinuous branching.

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大长度分形叶片图样的场发射研究

寻找高效、经济的强光束耦合源是现代真空微纳电子学的实际问题之一。就目前所知，很难求出场发射电流的大绝对值，这与发射分量的有效面积极小有关。发射分量的有效面积由阴极衬底面积构成10/sup -6/至10/sup -8/部分。增加有效发射面积的方法之一是将规则的二元光栅尖端转换为具有扩展分形边界的表面图案叶片或平面端形。显然，来自这个或那个部分的大量表面微纳米结构可以被称为自然分形。结果表明，在不连续分支中，通过简单的真空放电转换平均周期为65-70 nm，高度为7-8 nm，顶部曲率半径为2-3 nm的二维模式，可以从根本上改善导电衬底上紧密设置的薄膜和单片碳模式的场发射性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839)

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