A digitally controlled fully integrated voltage regulator with 3D-TSV based on-die solenoid inductor with backside planar magnetic core in 14nm tri-gate CMOS

Abstract

A fully integrated digitally controlled buck VR, featuring hysteretic and PFM control for maximum light load efficiency, with 3D-TSV based on-die solenoid inductor with backside planar magnetic core in 14nm tri-gate CMOS demonstrates 111 nH/mm2 inductance density & 80% conversion efficiency.