A temperature compensation subsystem for an IMEMS CMOS pressure sensor

Abstract

This work presents a temperature compensation subsystem for a piezoresistive pressure microsensor system operating between 0-50 kPa for medical purposes. Different full scale span and offset voltage can be compensated easily against temperature effects with a CMOS circuit that generates two temperature dependent voltages with 64 possible settings of temperature coefficients: the drive voltage of the active bridge and the reference voltage of the offset cancellation DAC. The subsystem showed a total power dissipation of approximately 3 mW working with 3 volts of power supply.