Assessing lead-free barium zirconate titanate-barium calcium titanate thin films ferroelectric properties in planar configuration

Abstract

This work reports about the production and characterization of Barium Zirconate Titanate-Barium Calcium Titanate (BZT-BCT) ferroelectric-piezoelectric thin films proposed as an alternative to toxic lead zirconate titanate (commonly referred as PZT), widely used in micro-electro-mechanical devices. A highly stable and homogeneous solution, produced thanks to a thorough reagents dehydration, has been deposited on commercial platinum-coated wafers, thus obtaining perovskites thin layers with homogeneous morphology and improved electrical stability with outstanding electrical performances in planar configuration.