Dynamic precision reliability analysis for six degrees of freedom micro-displacement mechanism of reticle stage in lithography machine based on Monte-Carlo

Abstract

Multi-layer lithography machine is one of the most important equipment in integrated circuit production and it has attracted considerable interests on the dynamic reliability and precision reliability. This paper focuses on the dynamic precision reliability of six DOF micro-displacement mechanism in reticle stage, and establishes a dynamic error model based on homogeneous coordinate array theory. The dynamic precision reliability of each movement direction is calculated by MonteCarlo. The dynamic precision reliability analysis provides a theoretical basis for the precision reliability assurance and the reliability design of the micro-displacement mechanism.