GaAs monolithic integrated microwave power sensor in coplanar waveguide technology

Abstract

We present the fabrication technology, theoretical and experimental results of a novel MMIC compatible broadband power sensor. With a 50 /spl Omega/ coplanar waveguide design, integrated AlGaAs thermoelectric sensor and GaAs bulk micromachined membrane for increased sensitivity, this sensor is capable of detecting RF power with a sensitivity of 1.1 V/W without any waveguide coupling structure.