Design and simulation of polymer piezo-electric MEMS microphone

Abstract

The development of the MEMS microphone has been an active area of research over the past several decades. MEMS microphones have advantages such as compact size, high signal-to-noise ratio, high sensitivity, quick response, and long term stability. MEMS microphone is also compatible with the surface mount process. There are various design considerations for MEMS microphone such as less interference, better sound quality, higher sensitivity, higher signal to noise ratio, less current drain, and low distortion. MEMS microphones are similar to the standard ECMs (electrets condenser microphones) found in modern consumer electronics, except that the components are built onto a single chip using CMOS technology (material deposition & etching), rather than assembled from discrete parts. In this an SU8 polymer MEMS piezoelectric microphone is designed and simulated using COMSOL Multiphysics tool. The physics used for analysis is structural mechanics and Piezo-Electric Devices.