35/spl times/2 inch wafer MOVPE system for electronic and optoelectronic devices

Abstract

Results of the AIX 2600G3 planetary reactor(R) in the 35/spl times/2 inch configuration with Gas Foil Rotation(R) will be shown. Measurements including all seven 2 inch wafers of one satellite will be presented. As a further detailed study and tuning of the AIXTRON Planetary Reactor(R) system AIX 2600G3 in the 35 times 2 inch configuration, we investigated the depletion behaviour along the reactor radius using rotating, as well as intentionally fixed satellites. Very often doped DBR-structures are used as a mirror below the active region of the AlGaInP LED to increase the light output. So AlAs/GaAs distributed Bragg reflectors (DBR) were chosen to optimise the thickness homogeneity and gallium efficiency across the five 6 inch satellites in dependence of the total flow. Further on, we examined the influence of the total reactor pressure on the semiconductor layer composition via X-ray data of AlInP. To check the adjustments of our reactor configuration we chose the critical and very temperature sensitive material system AlGaInP, as well as AlGaInP-MQW structures.