Micromachined experimental structure for optimization of multilayer p/sup +/Si/(metal, semiconductor) thermopile IR detectors and thermal converters

Abstract

This paper presents the design and fabrication technique of a test structure with p/sup +/Si/metal and p/sup +/Si/sputtered-Si thermopiles intended for optimization of performance of multilayer thermopile IR detectors and thermal converter. An experimental structure is fabricated using micromachining techniques.