Cylindrical microscale plasma generation with a partially anodized aluminum oxide wire and transparent ITO electrode

Abstract

This paper describes the initial demonstration of a novel co-axial microscale plasma. The plasma is analyzed under experimental conditions using anodized aluminum wires. The unique electrode structures were characterized during ignition, breakdown, and steady state conditions. The use of a unique nanopore structure provides the foundation for stable microscale plasma with inherently lower power consumption and longer lifetime. Microscale plasmsa offer significant benefits in a variety of applications ranging from illumination, bio-medical treatment procedures, chemical sensing, and semiconductor processing.