Gas-sensing characteristics of ruthenium-doped SnO2 thin films in a propane atmosphere

Abstract

We present results about the preparation and characterization of ruthenium doped-tin oxide (SnO2:Ru) thin films in a controlled atmosphere containing gas propane (C3H8) at different operation temperatures. The SnO2:Ru thin films were deposited by the spray pyrolysis technique onto soda-lime glass substrates. The effect of the addition of [Ru/Zn]=1 at. % to the SnO2 films, the operation and deposition temperatures, the propane concentration, and the annealing-time (vacuum at 400degC, time=1 or 2 h) on the films sensitivity has been studied. Two-hour sintered SnO2:Ru (1%) thin films, with a thickness on the order of 70 nm, measured at 300degC in a propane atmosphere of 500 ppm gave rise to the highest sensitivity registered in this work, ~8