Effect of annealing and drying temperature on TiO2 nanostructured film

I. H. Affendi, Z. Nurbaya, N. Azhar, M. N. Wahida, M. Sarah, M. Rusop
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Abstract

In the production of nanostructured TiO2, the annealing temperature for the film is differed to clarify that by the use of different temperature in annealing the film, the best temperature to get a good mobility for the current flow can be found. There are 7 samples with different drying temperature and different annealing temperature. The ones with different drying are not annealed and the other that has the same drying is discussed based on different annealing temperature. Which one will have the highest IV characterization. As further discovered that the as deposited without annealing have a quite thick film that it could not be characterized by Atomic Force Microscopy (AFM), so only the thinnest that is a 500°C annealed film can be characterized using AFM. The highest point of the current at 10V in the IV graph is 500 C annealing temperature of 6.06E-9 which then makes it the highest in conductivity at 3.37E-6. The current-voltage (I-V) measurement is used to study the electrical resistivity behaviour, hence the conductivity of the film.
退火和干燥温度对TiO2纳米结构薄膜的影响
在制备纳米结构TiO2的过程中,薄膜的退火温度是不同的,这表明通过使用不同的温度对薄膜进行退火,可以找到获得良好的电流迁移率的最佳温度。不同的干燥温度和退火温度有7个样品。不同干燥方式的不退火,相同干燥方式的根据不同退火温度进行讨论。哪一个会有最高的IV表征。进一步发现,未经退火沉积的薄膜具有相当厚的薄膜,无法用原子力显微镜(AFM)进行表征,因此只有最薄的即500°C退火薄膜才能使用AFM进行表征。在IV图中,电流在10V时的最高点是500℃退火温度为6.06E-9,因此电导率在3.37E-6时最高。电流-电压(I-V)测量用于研究薄膜的电阻率行为,从而研究薄膜的导电性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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