Integrated nanotechnology, electronics and microsystems: Sensing paradigms and transformative MEMS technologies

14th IEEE International Conference on Nanotechnology Pub Date : 2014-12-01 DOI:10.1109/NANO.2014.6968073

I. Puchades, L. Fuller, S. Lyshevski

{"title":"Integrated nanotechnology, electronics and microsystems: Sensing paradigms and transformative MEMS technologies","authors":"I. Puchades, L. Fuller, S. Lyshevski","doi":"10.1109/NANO.2014.6968073","DOIUrl":null,"url":null,"abstract":"We document transformative research, practical engineering solutions and enabling sensing technologies. Microsystems integrate nanotechnology, microelectronics and micromachining. Micro-electromechanical systems (MEMS) are used in various applications. In aerospace, automotive, energy, manufacturing, medical, naval and other systems, autonomous MEMS measure physical quantities, process the data, transmit information and ensure control. Acceleration, electromagnetic fields, flow rate, position, pressure, temperature, velocity, viscosity and other physical quantities can be measured. MEMS enable biotechnology and medicine. Microsystems measure impurities, analyse bio and chemical compositions of liquids and gasses, perform DNA profiling, analyse genes and proteins, etc. Using recent nanotechnology-enabled solutions, we use application-specific nanostructured sensing materials and fabrics. A consistent device-level integration of nanostructured materials and nanoscaled microelectronic is ensured. Modular MEMS include self-sustainable energy sources, energy storage solution and energy management. We design, fabricate, test and characterize functional autonomous microsystems.","PeriodicalId":367660,"journal":{"name":"14th IEEE International Conference on Nanotechnology","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"14th IEEE International Conference on Nanotechnology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2014.6968073","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

Abstract

We document transformative research, practical engineering solutions and enabling sensing technologies. Microsystems integrate nanotechnology, microelectronics and micromachining. Micro-electromechanical systems (MEMS) are used in various applications. In aerospace, automotive, energy, manufacturing, medical, naval and other systems, autonomous MEMS measure physical quantities, process the data, transmit information and ensure control. Acceleration, electromagnetic fields, flow rate, position, pressure, temperature, velocity, viscosity and other physical quantities can be measured. MEMS enable biotechnology and medicine. Microsystems measure impurities, analyse bio and chemical compositions of liquids and gasses, perform DNA profiling, analyse genes and proteins, etc. Using recent nanotechnology-enabled solutions, we use application-specific nanostructured sensing materials and fabrics. A consistent device-level integration of nanostructured materials and nanoscaled microelectronic is ensured. Modular MEMS include self-sustainable energy sources, energy storage solution and energy management. We design, fabricate, test and characterize functional autonomous microsystems.

查看原文本刊更多论文

集成纳米技术，电子和微系统:传感范例和变革性MEMS技术

我们记录了变革性的研究、实用的工程解决方案和使能的传感技术。微系统集成了纳米技术、微电子和微机械加工。微机电系统(MEMS)应用于各种领域。在航空航天、汽车、能源、制造、医疗、海军等系统中，自主MEMS可以测量物理量、处理数据、传输信息并确保控制。可测量加速度、电磁场、流量、位置、压力、温度、速度、粘度等物理量。MEMS使生物技术和医学成为可能。微系统测量杂质，分析液体和气体的生物和化学成分，进行DNA分析，分析基因和蛋白质等。利用最新的纳米技术解决方案，我们使用特定应用的纳米结构传感材料和织物。确保了纳米结构材料和纳米微电子的一致器件级集成。模块化MEMS包括自我可持续能源、能源存储解决方案和能源管理。我们设计，制造，测试和表征功能自主微系统。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

14th IEEE International Conference on Nanotechnology

自引率

0.00%

发文量