Viscous damping influence on dynamic characteristics in MEMS variable capacitor

Abstract

Dynamic characteristics of movable electrode in MEMS variable capacitor using ANSYS software are studied. It is discovered that significant contribution to the vibration system damping is introduced by squeeze-film damping between serpentine spring arms. It is found that the vibration amplitude is inversely proportional to the stiffness coefficient and directly proportional to the number of the arms. At the same time, the amplitude is inversely proportional to damping ratio and to the arms number too. In the studied case the elastic force is strongly suppressed by the damping force.