A measurement system for the acquisition of degradation data in AlCu metallizations

IMTC/2002. Proceedings of the 19th IEEE Instrumentation and Measurement Technology Conference (IEEE Cat. No.00CH37276) Pub Date : 2002-08-07 DOI:10.1109/IMTC.2002.1006895

M. Catelani, R. Nicoletti, M. Baggiani, R. Singuaroli

引用次数: 0

Abstract

A fully custom designed automatic measurement system has been realized in order to acquire degradation data on thin-film AlCu metal test patterns, performing 4-wire resistive measures. A thermal reliability test is performed and degradation data are presented.

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一种用于获取铝铜金属化过程中降解数据的测量系统

为了获得薄膜AlCu金属测试模式的退化数据，实现了一个完全定制设计的自动测量系统，执行4线电阻测量。进行了热可靠性试验，并给出了退化数据。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IMTC/2002. Proceedings of the 19th IEEE Instrumentation and Measurement Technology Conference (IEEE Cat. No.00CH37276)

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