I. Sayago, E. Hontañón, J.P. Santos, M. Aleixandre, J. Lozano
{"title":"Nanostructured Tin Oxide Sensors Based on Nanofibers and Nanowires for Detection of Low NO2concentration","authors":"I. Sayago, E. Hontañón, J.P. Santos, M. Aleixandre, J. Lozano","doi":"10.1109/CDE.2018.8597162","DOIUrl":null,"url":null,"abstract":"The responses of nanostructured one-dimensional (1D) tin oxide NO2sensors at low temperatures have been compared. The structures studied were nanofibers (NFs) and nanowires (NWs). The sensors were used for NO2low concentration detection. NFs and NWs were grown onto micromachined silicon substrates by electrospinning and low-pressure chemical vapour deposition (LPCVD), respectively. Morphological characteristics of the 1D nanostructures are investigated by scanning electron microscopy (SEM) and the sensing properties of the sensors are assessed and compared.","PeriodicalId":361044,"journal":{"name":"2018 Spanish Conference on Electron Devices (CDE)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 Spanish Conference on Electron Devices (CDE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CDE.2018.8597162","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The responses of nanostructured one-dimensional (1D) tin oxide NO2sensors at low temperatures have been compared. The structures studied were nanofibers (NFs) and nanowires (NWs). The sensors were used for NO2low concentration detection. NFs and NWs were grown onto micromachined silicon substrates by electrospinning and low-pressure chemical vapour deposition (LPCVD), respectively. Morphological characteristics of the 1D nanostructures are investigated by scanning electron microscopy (SEM) and the sensing properties of the sensors are assessed and compared.