Photoluminescence studies of anodic-oxide-induced intermixing of GaAs/AlGaAs quantum well heterostructures

P. Burke, M. Gal, S. Yuan, Y. Kim, C. Jagadish
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Abstract

A novel impurity-free interdiffusion technique, anodic-oxide-induced intermixing is demonstrated. A pulsed anodization of GaAs/AlGaAs quantum well heterostructures (QWH) with subsequent rapid thermal annealing (RTA) at 900/spl deg/C, is studied. Blue shifts of up to 72meV have been observed by photoluminescence (PL) in intermixed samples with no significant broadening of the linewidth and good retention of PL intensity. The blueshift in the PL spectra is shown to increase with no sign of saturation with RTA times up to 120 seconds.
阳极氧化诱导GaAs/AlGaAs量子阱异质结构混合的光致发光研究
提出了一种新的无杂质互扩散技术——阳极-氧化物诱导混合。研究了GaAs/AlGaAs量子阱异质结构(QWH)在900/spl℃下的脉冲阳极氧化和随后的快速热退火(RTA)。通过光致发光(PL)在混合样品中观察到高达72meV的蓝移,没有明显的线宽展宽和良好的PL强度保留。当RTA时间达到120秒时,PL光谱中的蓝移增加而无饱和迹象。
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