Quadrupole-electrode-integrated micropores for selective single-particle detections

Abstract

We fabricated a quadrupole-electrode-embedded micopore in a thin SiN membrane on a Si wafer. We demonstrated single-particle manipulation via a dielectrophoretic control through applying AC voltage to the electrodes to move only specific analytes to approach the pore. This manipulation-assisted sensor approach can be used for selective detections of specific analytes in biological samples by repelling oversized impurity particles through the dielectrophoretic mechanism whereby opening venues toward clinical use of nanopore technologies.