Field emission from heavily phosphorus-doped homoepitaxial diamond

T. Yamada, H. Kato, D. Takeuchi, S. Shikata, C. Nebel, H. Yamaguchi, Y. Kudo, K. Okano
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Abstract

Field emission characteristics of heavily phosphorus doped homoepitaxial diamond (111) after H-plasma treatment and wet chemical oxidization are discussed. Although H-terminated surface has a negative electron affinity (NEA), higher threshold voltage have to be applied compared to wet chemical oxidized surface with a positive electron affinity (PEA). From field emission results and surface characterizations, we conclude that a surface electric field is present which prevents electrons in the bulk of diamond to reach the vacuum level.
重掺磷同外延金刚石的场发射
讨论了高磷掺同外延金刚石(111)经h等离子体处理和湿法化学氧化后的场发射特性。虽然h端表面具有负电子亲和(NEA),但与具有正电子亲和(PEA)的湿化学氧化表面相比,必须施加更高的阈值电压。从场发射结果和表面表征,我们得出结论,表面电场的存在,阻止电子在金刚石体达到真空水平。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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