Micro-mirror array for multi-object spectroscopy in cryogenic environment

S. Waldis, F. Zamkotsian, P. Lanzoni, W. Noell, M. Canonica, N. D. de Rooij
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引用次数: 0

Abstract

Next-generation infra-red astronomical instrumentation for space and ground-based telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy (MOS) usable in a cryogenic environment. A 100x200 mum2 micro-mirror array was successfully designed, fabricated and tested, with tilting angle of 20deg at 100 V. In parallel we have developed and implemented a high-resolution Twyman-Green interferometer and a cryo-chamber for full surface and operation characterization. The micromirrors could be successfully actuated before, during and after cryogenic cooling. Surface deformation of gold coated mirrors at 300 K and below 100 K shows a slight increase from 35 nm to 50 nm PtV, still well suited for MOS application.
低温环境下多目标光谱微镜阵列
用于空间和地面望远镜的下一代红外天文仪器需要基于moems的可编程狭缝掩模,用于在低温环境下使用的多目标光谱(MOS)。成功地设计、制作并测试了100 × 200 mum2微镜阵列,在100 V下倾斜角度为20°。同时,我们开发并实施了高分辨率的Twyman-Green干涉仪和用于全表面和操作表征的冷冻室。微镜在低温冷却前、冷却中、冷却后均能成功启动。在300 K和低于100 K时,镀金镜的表面变形从35 nm到50 nm的PtV略有增加,仍然很适合MOS应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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