S. Waldis, F. Zamkotsian, P. Lanzoni, W. Noell, M. Canonica, N. D. de Rooij
{"title":"Micro-mirror array for multi-object spectroscopy in cryogenic environment","authors":"S. Waldis, F. Zamkotsian, P. Lanzoni, W. Noell, M. Canonica, N. D. de Rooij","doi":"10.1109/OMEMS.2008.4607855","DOIUrl":null,"url":null,"abstract":"Next-generation infra-red astronomical instrumentation for space and ground-based telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy (MOS) usable in a cryogenic environment. A 100x200 mum2 micro-mirror array was successfully designed, fabricated and tested, with tilting angle of 20deg at 100 V. In parallel we have developed and implemented a high-resolution Twyman-Green interferometer and a cryo-chamber for full surface and operation characterization. The micromirrors could be successfully actuated before, during and after cryogenic cooling. Surface deformation of gold coated mirrors at 300 K and below 100 K shows a slight increase from 35 nm to 50 nm PtV, still well suited for MOS application.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607855","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Next-generation infra-red astronomical instrumentation for space and ground-based telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy (MOS) usable in a cryogenic environment. A 100x200 mum2 micro-mirror array was successfully designed, fabricated and tested, with tilting angle of 20deg at 100 V. In parallel we have developed and implemented a high-resolution Twyman-Green interferometer and a cryo-chamber for full surface and operation characterization. The micromirrors could be successfully actuated before, during and after cryogenic cooling. Surface deformation of gold coated mirrors at 300 K and below 100 K shows a slight increase from 35 nm to 50 nm PtV, still well suited for MOS application.