Ebook Preview: STEM-in-SEM Imaging Techniques for Microelectronics Failure Analysis

Abstract

This article describes an ebook titled STEM-in-SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, intended as an introductory tutorial for those with little or no transmission imaging experience and as a source of ideas for SEM users looking to expand the imaging and diffraction capabilities of their equipment.