Low phase noise VCSO with diamond SAW resonators

S. Fujii, Y. Takada, H. Harima
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引用次数: 12

Abstract

L and S-band VCSOs with diamond SAW resonators have been developed based on Lesson's model. First, the crystallinity of diamond thin film required for high-frequency SAW resonators was characterized by Raman scattering and electron backscattering diffraction. From these measurements, it was found that the propagation loss of SAW was lowered in relatively degraded films having small crystallites, and preferential grain orientation. After optimizing CVD growth conditions, a 3.4 GHz diamond SAW resonator with low insertion loss and high Q-value has been successfully developed. Second, by using the diamond SAW resonators, and employing low temperature co-fired ceramics, L and S-band VCSOs with a low phase noise were successfully obtained
带金刚石SAW谐振器的低相位噪声VCSO
金刚石SAW谐振器的L波段和s波段vcso是在Lesson模型的基础上开发的。首先,利用拉曼散射和电子后向散射衍射表征了高频SAW谐振器所需的金刚石薄膜的结晶度。通过这些测量,发现在相对降解的薄膜中,具有小晶粒和优先晶粒取向的SAW的传播损耗降低。通过优化CVD生长条件,成功研制出低插入损耗、高q值的3.4 GHz金刚石SAW谐振腔。其次,利用金刚石SAW谐振腔和低温共烧陶瓷,成功获得了相位噪声低的L波段和s波段vcso
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