Effect of Gate Metal Work Function on Leakage Current in Single Pocket FDSOI 28 nm Transistor

Aryan Kannaujiya, Sandhya Kannaujiya, R. Chauhan
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引用次数: 3

Abstract

This brief is reporting a useful design to modulate threshold voltage and leakage current in single pocket fully depleted silicon on insulator. A comparative analysis has been made between the device without pocket and single pocket device. Since device size is in nanoscopic scale therefore a peak electric field occurs to mitigate this issue pocket is made. This work highlights the effects of variation in metal gate work function on threshold voltage and leakage current. Analysis shows the E-field distribution in single pocket device is much better than the E-filed distribution in the conventional device. On same metal gate work function 4.3 eV to 4.8 eV single pocket device has better switching speed and low leakage current than that of conventional device. The simulation of both devices has been handled by ALTAS TCAD tool.
栅极金属功函数对单口袋FDSOI 28nm晶体管漏电流的影响
本文报道了一种在单口袋全贫硅绝缘体上调制阈值电压和漏电流的实用设计。对无口袋装置和单口袋装置进行了对比分析。由于器件尺寸为纳米级,因此出现峰值电场以缓解这一问题。本文着重研究了金属栅功函数的变化对阈值电压和漏电流的影响。分析表明,单口袋器件中的电场分布要比传统器件中的电场分布好得多。在相同的金属栅功函数下,4.3 ~ 4.8 eV单口袋器件比传统器件具有更好的开关速度和更小的漏电流。用ALTAS TCAD工具对两种器件进行了仿真。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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