Influence of relativistic and quantum effects on the blur in projection lithography systems

Abstract

Classical and quantum effects producing changes in the blur for electronand- ion (H/sup +/ and He/sup +/) projection lithography are theoretically considered. Typically, the systems studied in this report operate with beam current up to 200 /spl mu/A and beam voltage up to 200 keV. The influence of a strong laser field on the interaction of beam particles into crossover is theoretically investigated. It is predicted, that for intensities of a laser field and for defined parameters of a beam, the effective potential of interaction of beam particles becomes a potential of attraction. It is shown, that this effect allows correcting the blur effect. The influence of quantum effects into crossover on blur is theoretically studied. It is shown, that for sufficiently strong currents and close-cut beams, the corrections due to quantum effects into crossover can have essential influence on blur.